The MEMS Group

About the Group

  • Micro Electro Mechanical Systems (MEMS) range in size from a few micons to a few millimeters and are made using techniques based on traditional semi-conductor photolitho-graphic processes
  • It is possible to combine electronic & mechanical processes within a single component & they can be made at low cost
  • They have exciting applications in the areas of sensors & flow control; this Group is seeking to exploit them in areas relevant to the airframe & propulsion